Green Product Highlights

Oriented toward market and customer demands, AMEC has always taken energy saving and emission reduction as one of the priority design principles when developing new products. AMEC has achieved outstanding results in the R&D and marketing development of Etch, CDP, MOCVD and other semiconductor equipment products, recognized by customers at home and abroad.
Etch刻蚀设备

Etch

Dual-station designMore effective throughputCompact footprintLow cost of ownership(CoO)

AMEC has been the pioneer to develop dual-station etching system in the industry. By sharing key components such as vacuum pumps and gas distribution systems between the two stations, AMEC has been able to effectively save the manufacturing cost, while reducing the generation of waste during the production process, which is a unique green etching product characterized by AMEC, and the Primo AD-RIE-e, Primo Twin-Star®, Primo TSV® are the examples of this type of products.

MOCVD

Flexible clustered chamber layoutHigh throughput          Excellent process performanceSimplified tool maintenance          Maximized tool utilization

AMEC’s MOCVD equipment is equipped with serial parallel, flexible chamber configuration, innovative real-time monitoring system, novel local temperature adjustable heating system to achieve superior temperature field uniformity and stability, and the leading heater DC power supply with high energy efficiency and anti-harmonics interference characteristics; has an advantage in the global GaN MOCVD equipment market, which is widely used in the illumination and display LEDs, UV LEDs and GaN power devices epitaxial mass production. and epitaxial mass production of GaN power devices.

MOCVD设备
CDP设备

CDP

Dual-station design
Higher throughput
Precise software control
High throughput
Whole system optimization          Reduce energy consumption

Each process chamber has two stations, and each station can be independently controlled. With this design not only can meet customer process requirements, but also remarkably improve chamber production efficiency. Furthermore, equipment manufacturing materials consumption also reduced. In addition, the specific-developed control software system for CDP series product is proven to be able to largely reduce idle time of process chamber, thus increase tool uptime and throughput, resulting in decreasing energy consumption during the idle time.

Subsidiaries' Innovation

Through such an extensive development strategy, our subsidiaries such as AMEC Huilian, AMEC Wisetron, SyWecon and many companies in which AMEC is involved in investing have all made good progress in the new business development field and are highly thought of by the market end users.
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VOCs purifiers
Local scrubbers

AMEC Wisetron, has always focused on the development of environmental protection and renewable energy industry. In recent years, AMEC Wisetron has developed industrial-scale Volatile Organic Compounds (VOCs) purifiers and eco-friendly local scrubbers, which are widely used to treat exhaust gases generated from the manufacturing of semiconductors, ICs, pan-semiconductors, and display panels, improving the working environment of clean rooms.

芯汇康
Big Health
Life Science

SyWecon specializes in product development within the Big Health field, focusing on the biomedical and life science industries. By leveraging its strengths in automation-driven R&D and precision optical technologies, AMEC develops full-scenario application products spanning from home healthcare to biotech research. Through intelligent integrated solutions, SyWecon empowers clients to achieve intelligent upgrading of production processes and enhancement of R&D efficiency, thereby driving the practical implementation of cutting-edge biomedical technologies.

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Industrial Internet Platforms

AMEC Huilian leverages its role as the digital cultivator in the IC industry. Through its innovative Industrial Internet platform We-Linkin, AMEC Huilian serves high-tech manufacturing supply chains, particularly in semiconductor equipment and upstream components. Guided by AMEC "Five Big Ten", We-Linkin has developed We-OTD —a business management system—to empower enterprises to achieve high-quality delivery and ecosystem collaboration capabilities in assisting them in building leading Digital Operation Systems. The platform improves operational capabilities continuously and fosters high-efficiency and sustainable development across supply chain by KPIs-driven, quantifiable, visualizing metrics in bussiness performance.